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激光干涉儀

LOS雙頻激光干涉儀系統概述

閱讀: 53

LOS雙頻激光干涉儀是以波長作為標準對位移和幾何量進行度量的儀器，LOS采用了自制的穩頻激光作為激光光源，精度可達到n m量級。LOS可以在很遠的距離達到很高的測試精度和解析度。

LOS系統應用范圍廣，除了可用于長度的精密測量外，配上適當的附件還可測量角度、直線度、平面度、振動距離及速度等等。

該公司同時提供基于CCD的幾何度量系統，使得測量更加靈活、快速，并保證精度。

主要特點：

3年內激光波長精度不低于 0,02 ppm.
激光10年內滿足測試要求
激光無需采用任何穩頻措施（如加熱）
無需預熱，開機即可開始測量（一般激光需要預熱，使得激光波長穩定下來）
激光波長精度不受反射激光影響！（一般的激光干涉儀反射可導致嚴重的測量誤差）
提供激光氣體更換服務，即10年后，可以更換激光管的氣體，達到新激光管的性能（公司擁有自己的領先HeNe激光生產技術）
空氣和材料溫度傳感器等均采用無線連接，安裝和使用簡單易用。
通訊界面可以選 Ethernet, USB and WiFi，并自帶獨立顯示器
標準質保期 36 個月（3年）

測量參數：

位置測量 Position
速度 Velocity
加速度 Acceleration
線性，準直度 Straightness
矩形 Squareness
角度 Angles
平面面型 Flatness
平行度 Parallelism

應用領域：

	Machinery機械行業
	機床校正和補償 Machine tool calibration and compensation 三坐標測量機校正 Calibration of CMMs 測量儀器校正 Calibration of measuring devices 產品質量控制 Production quality control 幾何尺寸測量 Measurement of dimensions 機床調整，對中 Adjustment and alignment of machines and devices 機床維護 Maintenance of machines 高精度機床內部Internal measurement system for high-accuracy machines 螺桿質量測試 Lead screw verification 動態測量 Dynamic measurement
	航空和汽車工業 Aircraft and automobile industry
	大尺寸工件高精度測量 Measurement and checking of large dimensions
	計量校正 Metrology and calibration institutes
	作為長度標準，具有不同的應用 The system is used in various applications as a length standard
	微電子行業 Microelectronic industry
	The internal multiaxis system for high precision positioning mechanisms with both open and closed control loop, e.g. - step and repeat cameras - testing of semiconductor wafers - laser writing machines
	Other applications
	任何需要對位置和幾何參數精密測量的行業和應用，以及研發、科學研究等領域

動態測試功能：

LOS 雙頻激光干涉儀可以進行動態測試，采樣頻率可達500Hz，完成測量后，即可進行數據處理，可以按照需要的格式進行顯示和打印。 WinScope軟件除了可以提供測試的數值外，還有許多便利的功能，如,觸發模式設置，計算和統計功能， FFT快速傅里葉變換算法，光譜分析, 強大的圖形顯示等.

位移，速度、加速度測試

閱讀: 44

Standard LOS System configuration is designed to measure position, velocity and acceleration. A typical application is the calibration of positional accuracy of CNC machine tools. In this measurement the difference between the desired and actual position of the machine's moving part is evaluated. The method of measurement and evaluation corresponds to international standards (ISO 230-2, VDI/DGQ 2617,3441, NMTBA). The whole measurement process and printing of protocol is controlled by the computer programme and is fully automatic.

Software Compensation of Machine Tool Positional Errors

The measured positional errors can be transferred as correction data on line into the machine tool control system immediately after measurement. Considerable improvement of positional accuracy can thus be achieved in a minimum time. The producer delivers software modules which compensate for various control systems (SIEMENS, HEIDENHEIN, DYNAPATH, SELCA, YASNAC, FANUC, ACRAMATIC).

Further Applications

Positional accuracy of a co-ordinate measurement machine can be calibrated in a similar way (VDI 2617 standard). The LOS system is used also for the calibration of dimensional gauges. Laser systems cannot be replaced when precision measurement of long distances (up to 40 meters) is required.

Technical Specifications

Measurement range		0 - 40 m
Resolution		1.25 nm (lambda/512)
Accuracy in vacuum		10^-7 x measured length ± resolution ± 0.6 nm
Accuracy with the LS70 Comp. unit		(0 - 40°C ): 1µ/m
Max. velocity		1 m/s - PC card LS 30.11 2 m/s - PC card LS 30.12

線性度 Straightness 測量

閱讀: 44

Errors in straightness of movement and in parallelity of axes can be measured by the LS 127ST set. The laser beam is split in the LS 127.1 differential beamsplitter into two parallel beams. After going through the optical wedge LS 127.2 the beams diverge at a small angle. The optical wedge functions as the straightness sensor. Reflector LS 127.3, formed by two inclined extremely precise plane mirrors, returns the beams back into the differential beamsplitter. The axis of the mirror reflector defines the straight line reference. This straightness measurement method is less sensitive to air turbulence disturbances than other methods. This straightness set also shows low sensitivity to possible inclinations of the straightness sensor during its movement at measurement.

The standard configuration for position measurement except the LS 20.1, LS 21.1, LS 70, LS 90.1, LS 90.3 is used for straightness measurement. The optical parts are fixed by the set of holders LS 51.

技術參數

Longitudinal measurement range		3 m (or according to requirements)
Transverse measurement range		±3 mm
Measurement Accuracy		(± 0,005 X ±0,5 ±0,3 M² ) µm X - measured deviation in µm M - measured longitudinal distance in m

: 鏡頭離軸優化測量系統

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